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Silicon (Si) is a chemical element with symbol Si and atomic number 14.
A hard and brittle crystalline solid with a blue-grey metallic lustre, it is a tetravalent metalloid and semiconductor.
Poly Si can use different chemistries using pure and diluted silane. High quality Poly Si over 2inch wafers.
Si may be dry etched using HBr based selective silicon etching with the Inductively Coupled Plasma (ICP) process technique.
Large process database on various process chemistries.
Competitive process results in a large number of applications from black Si formation to high aspect ratio features.
Cryogenic Si etch
Cryogenic Si etch
Ultra high selectivity cryo-silicon etch
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