ALD 原子層堆積Atomfab ALDFlexAL ALD
ALE 原子層エッチングPlasmaPro 100 ALE
イオンビームIonfab IBEIonfab IBD
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Over time, components wear out and require replacement - our spares kits are designed with the aim of giving you the ability to choose levels of system support tailored to your requirements, saving unnecessary costs. Fitting 3rd party parts can compromise system and process performance, so we suggest always using genuine Oxford Instruments spare parts.
Our spares are located in varied, strategic locations around the world, allowing us to deliver parts to you quickly when required.
Our contracts for support include offers or cover of spare parts. We offer different levels of support and fully customised contracts are available to meet your requirements.
Replacing a part? Why not explore our upgrades to browse all options. We offer a range of system upgrades that both extend the life of your system and add new functionality.
Contact our support team so we can help you find the best solution.