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Amorphous Silicon (a-Si) as a semiconductor is the most widespread material used for photovoltaic technologies ie. solar cells. It is also used for thin film transistors in liquid crystal displays (LCDs). a-Si can be deposited using Plasma Enhanced Chemical Vapour Deposition (PECVD) and Inductively Coupled Plasma CVD (ICP-CVD)
Uniform film deposited with low stress. Doping possible with PH3 and B2H6
Uniform film deposited with low stress. Doping possible with PH3 and B2H6
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