プロダクト
ALD 原子層堆積Atomfab ALDFlexAL ALD
ALE 原子層エッチング
PlasmaPro 100 ALEイオンビーム
Ionfab IBEIonfab IBDソフトウェア
PTIQ Software
Ion beam etch offers maximum flexibility coupled with excellent uniformity and is suitable for a wide range of applications. Our systems have flexible hardware options including open load, single substrate load lock and cassette to cassette. System specifications are closely tuned to applications, enabling faster and repeatable process results.