Internal Gas Pod Upgrade - Plasma Technology - オックスフォード・インストゥルメンツ

Upgrades

Wide temperature range electrode upgrade

Expand the capability of your tool -New processes possible by the addition of different gases*

Up to 4 lines can be added with an internal gas pod

This means that even if your external gas pod is at full capacity, you can add further gases to your tools and enable a broader range of processes or MFC flow ranges.

Features & benefits

Up to 4 extra gas lines
Additional to external gas pod lines
Compact installation

Extra processes
Broader MFC flow ranges
Extra capacity

*Non-toxic gases only

Image gallery

Service & Support Contracts

Genuine Oxford Instruments Spare Parts

Spares kits

Our repairs and exchange services are particularly beneficial for electrical and electronic modules and high value components

Repairs/Exchange

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