WIDE TEMPERATURE RANGE ELECTRODE UPGRADE

Significant design improvements have been made to Oxford Instruments’ wide temperature range electrodes.

Features of the electrode re-design upgrade

• Increased structural strength of the electrode across the entire temperature range (-150ºC to +400ºC)
  Delivers improved dimensional stability of the electrode, maintaining flatness of the upper surface and hence efective heat transfer to and from the wafer
• Up-rated heating element to 2kW
  Delivers more heat to the electrode thereby reducing temperature ramping times, increased element lifetime and improved temperature uniformity over the upper surface
• Design allows fitting of two temperature probes
  Temperature control and over temperature limit “watch dog” provision
• Increased fluid flow capacity within the electrode
  Delivers increased cooling performance at the wafer, allowing a wider range of processing parameters to be employed
• Re-design of temperature probe with increased dc bias capability
  Increased processing window with dc bias capability to 1kV, up from 500V limit of previous design