Plasma Platforms

Equipment Training

Examine and explore, in detail, the various hardware blocks, software diagnostic options and electrical schematics of your system.

You'll learn:

• Benchmark tool performance prior to maintenance
• How to carry out essential skills, such as returning of the AMU
• How to recognise and isolate hardware issues using service mode
• Appreciate the interlock scheme and interpreting alarm signals appropriately

Maintenance Training

Using a PlasmaPro training system, explore the various system hardware and mechanical assemblies in a risk-free environment.

You'll learn:

• How to benchmark tool performance
• Disassembly and rebuild of electrode and source
• Main hardware blocks and internal electrical structure
• Theoretical units on the interlock scheme, PLC and RF
• Learn how to utilise Logviewer and diagnostic viewer to identify faulty hardware
• Practice diagnostic skills with a range of preset fault scenarios

Advanced Training

For those looking to become self-sufficient to maintain their own systems and intend to bring yearly preventative maintenance in-house. This course provides comprehensive instruction for maintenance and equipment engineers.

You'll learn:

• How to benchmark system performance
• How to disassemble, clean and maintain the system with step-by-step instruction
• Essential skills (taught in a practical environment)

Included in the training are a full suite of training presentations on system operation, hardware and schematics, and a PM kit for the system.

New User Training

For new members of your team or those unfamiliar with system software.

You'll learn:

• How to operate system software in a risk-free environment
• Skills such as recipe writing and retrieving wafers manually using service mode
• Understanding and responding appropriately to system alerts

The course can be adapted to suit the background, experience and needs of those attending.

Additional Training

Handler Training

Held at our Plasma Technology Headquarters, you'll look at the Brooks MMX, Hine or EMS platforms. This course is ideal for maintenance and equipment engineers.

You'll learn:

• How to rectify wafer placement errors and reset the handling using the hand pendant
• Basics setup routines
• Wafer size changes
• Elevator configuration and set up

ALD Training

Examine and explore, in detail, various hardware blocks, software diagnostic options and electrical schematics of your system. Some classroom units are included.

You'll learn:

• Essential on-tool skills for equipment and maintenance engineers
• How to identify and rectify hardware issues from commonly-occurring symptoms

Process Training

Process engineers looking to develop the essential skills required to better understand the various processes including process optimisation and analysis.

You'll learn:

• Introduction to Process (general or specific to requirements)
• Process setup and Optimisation (including process trends)
• Process measurements and analysis techniques
• Endpoint training (optional)
• Chamber cleaning (Plasma and mechanical cleaning)
• LogViewer for identifying system health trends
• Process troubleshooting