LN₂ AUTOCHANGEROVER UNIT FOR TABLE COOLING FLUID SWITCHING

Key Benefits:

• Cost and time savings
• Accelerated cooling in temperature range 200°C to 0°C
• Fully automated
• Excels at time-saving when rapid mode change is required
• Unmanned/Overnight mode changes

Key Features:

• Setpoint range: -150 °C to +400 °C (System 100 tool)

Compatibility & Cooling

Systems compatible with LN2 Auto Changeover Unit

• This Autochangeover unit can be used with all new or existing Plasmalab/PlasmaPro systems with a Cryo Table or RIE heated electrode fitted.
• It could also be used to purge chiller fluid from Hot Tables.

Comparison table shows from Hot Tables assisted vs unassisted cooling, offering proven time and cost savings