CONNECT YOUR SYSTEM TO SECS GEM FACTORY AUTOMATION SOFTWARE

Enable your plasma tools to be incorporated into your SECS GEM HOST software scheme
Monitor and control the product and tool status for each tool
Allows the tool to be fully included in all your current factory automation functions such as SPC, Preventative Maintenance Scheduling, Event notification etc

Industry Standard protocol - straightforward Integration of equipment into existing GEM-SECS HOST workflow
Reduces chance of operator errors – Automated control of equipment by factory HOST Automated real-time feedback on system status and recipe execution status from equipment to HOST
Supports 200mm SEMI standards E4, E5, E30 and E37