オックスフォード・インストゥルメンツー事業部ページ
拡張
Collapse
オックスフォード・インストゥルメンツ
アプリケーション
プロダクト
ニュース
イベント
お問い合わせ
IR情報
採用情報
新卒採用情報
ニュース
イベント
お問い合わせ
jp
en
cn
jp
en
cn
IR情報
採用情報
About Us
当社の最新設備
当社の設備
ニュース
イベント
製造向けソリューション
研究開発向けソリューション
サステナビリティ
マーケット
2次元材料
拡張現実
バイオメディカルデバイス
故障解析
高輝度LED
MEMS・センサー
IRセンサー
レーザー
マイクロLED
パワーデバイス
量子技術
RFデバイス
VCSEL
テクノロジー
プラズマエッチング
リアクティブイオンエッチング (RIE)
プラズマRIE (RIE-PE)
誘導結合プラズマ RIE (ICP RIE)
シリコン深堀 RIE (DRIE)
プラズマ研磨ドライエッチング (PPDE)
イオンビーム
イオンビームデポジション (IBD)
イオンビームエッチング (IBE)
プラズマ デポジション
プラズマ CVD (PECVD)
誘導結合プラズマCVD (ICPCVD)
化学気相堆積 (CVD)
原子スケール
原子層堆積 (ALD)
原子層エッチング (ALE)
原子スケールプロセス (ASP)
マテリアル & プロセス
SiC
SiO
2
Al
2
O
3
Cr
AlGaN/GaN
Browse more...
プロダクト
ICP RIE エッチング
PlasmaPro 80 ICP RIE
PlasmaPro 100 Cobra ICP RIE
PlasmaPro 100 Cobra GaAs VCSEL
PlasmaPro 100 Polaris ICP RIE
RIE エッチング
PlasmaPro 80 RIE
PlasmaPro 100 RIE
PlasmaPro 800 RIE
DSiE シリコン深堀エッチング
PlasmaPro 100 Estrelas DSiE
PECVD
PlasmaPro 80 PECVD
PlasmaPro 100 PECVD
PlasmaPro 800 PECVD
ICPCVD
PlasmaPro 100 ICPCVD
CVD
PlasmaPro 100 Nano CVD
ALD 原子層堆積
Atomfab ALD
PlasmaPro ASP
FlexAL ALD
ALE 原子層エッチング
PlasmaPro 100 ALE
PlasmaPro 100 with Etchpoint
イオンビーム
Ionfab IBE
Ionfab IBD
ソフトウェア
PTIQ ソフトウェア
SECS/GEM ソフトウェア
ライブラリ
ブログ
プロセスNews
ビデオ
ウェビナー
White paper (技術資料)
導入事例
カスタマーギャラリー
ユーザーからの論文のご紹介
サポート
Service & Support
サービス契約
アップグレード & ソフトウェア
PTIQ ソフトウェア
スペア
トレーニング
チームビュワー
Raise a Support Ticket
お問い合わせ
お問い合わせ
ショップ
ニュース
イベント
お問い合わせ
eコマース
UPGRADES
ガスポッドのアップグレード
ホーム
サービス & サポート
アップグレード
ガスポッド
柔軟性を高めるガスポッドのアップグレード
オックスフォード・インストゥルメンツのガスポッドは、追加のガスラインを組み込むことが可能であり、ユーザーに高い柔軟性を提供します。ユーザーの要求の変化に応じて、ラインを追加可能です。
利点
有毒および毒性のないガスに適応
すべてのオックスフォード・インストゥルメンツPlasmaProシステムで利用可能（Ionfabツールのアップグレードは、利用可能かどうか個別に検討されます）
最大12本のガスラインに対応（ガスポッドの構成によって異なります）
インストールは迅速かつ容易
最新バージョンのマスフローコントローラ（MFC）を設置可能
柔軟性が向上し、各プロセスのチャンバーで利用できるプロセスの種類が増加
業界標準のMFCマウントにより、異なるメーカーのMFCを設置可能
価格に関するお問い合わせ
First Name
*
Last Name
*
Email
*
Country/Region
*
Toggle Dropdown
国地域
Afghanistan
Aland Islands
Albania
Algeria
American Minor Outlying Islands
American Samoa
American Virgin Islands
Andorra
Angola
Anguilla
Antarctica
Antigua and Barbuda
Argentina
Armenia
Aruba
Australia
Austria
Azerbaijan
Bahamas
Bahrain
Bangladesh
Barbados
Belgium
Belize
Benin
Bermuda
Bhutan
Bolivia
Bonaire, Sint Eustatius and Saba
Bosnia and Herzegovina
Botswana
Bouvet Islands
Brazil
British Indian Ocean Territory
British Virgin Islands
Brunei Darussalam
Bulgaria
Burkina Faso
Burundi
Cabo Verde
Cambodia
Cameroon
Canada
Cayman Islands
Central African Republic
Chad
Chile
China
Christmas Island
Cocos (Keeling) Islands
Colombia
Comoros
Cook Islands
Costa Rica
Cote d'Ivoire
Croatia
Cuba
Curaçao
Cyprus
Czech Republic
Democratic Republic of the Congo
Denmark
Djibouti
Dominica
Dominican Republic
Ecuador
Egypt
El Salvador
Equatorial Guinea
Eritrea
Estonia
Ethiopia
Falkland Islands
Faroe Islands
Federated States of Micronesia
Fiji
Finland
France
French Guyana
French Polynesia
French Southern Territories
Gabon
Gambia
Georgia
Germany
Ghana
Gibraltar
Greece
Greenland
Grenada
Guadeloupe
Guam
Guatemala
Guernsey
Guinea
Guinea-Bissau
Guyana
Haiti
Heard and McDonald Islands
Honduras
Hong Kong
Hungary
Iceland
India
Indonesia
Iraq
Ireland
Isle of Man
Israel
Italy
Jamaica
Japan
Jersey
Jordan
Kazakhstan
Kenya
Kiribati
Kuwait
Kyrgyzstan
Laos
Latvia
Lebanon
Lesotho
Liberia
Libya
Liechtenstein
Lithuania
Luxembourg
Macao
Madagascar
Malawi
Malaysia
Maldives
Mali
Malta
Marshall Islands
Martinique
Mauretania
Mauritius
Mayotte
Mexico
Moldova
Monaco
Mongolia
Montenegro
Montserrat
Morocco
Mozambique
Myanmar
Namibia
Nauru
Nepal
Netherlands
New Caledonia
New Zealand
Nicaragua
Niger
Nigeria
Niue
Norfolk Islands
North Mariana Islands
Norway
Oman
Pakistan
Palau
Panama
Papua New Guinea
Paraguay
Peru
Philippines
Pitcairn Islands
Poland
Portugal
Puerto Rico
Qatar
Republic of North Macedonia
Republic of South Sudan
Republic of the Congo
Reunion
Romania
Rwanda
Saint Barthelemy
Saint Helena
Saint Kitts and Nevis
Saint Martin
Samoa
San Marino
Sao Tome and Principe
Saudi Arabia
Senegal
Serbia
Seychelles
Sierra Leone
Singapore
Sint Maarten (Dutch part)
Slovakia
Slovenia
Solomon Islands
Somalia
South Africa
South Georgia and the Southern Sandwich Islands
South Korea
Spain
Sri Lanka
St. Lucia
St. Pierre and Miquelon
St. Vincent and the Grenadines
State of Palestine
Suriname
Svalbard
Sweden
Switzerland
Taiwan
Tajikistan
Tanzania
Thailand
The Kingdom of Eswatini
Timor-Leste
Togo
Tokelau Islands
Tonga
Trinidad and Tobago
Tunisia
Turkey
Turkmenistan
Turks and Caicos Islands
Tuvalu
Uganda
Ukraine
United Arab Emirates
United Kingdom
Uruguay
USA
Uzbekistan
Vanuatu
Vatican City
Venezuela
Vietnam
Wallis and Futuna Islands
West Sahara
Yemen
Zambia
Zimbabwe
US State
*
Toggle Dropdown
選択
Alabama
Alaska
Arizona
Arkansas
California
Colorado
Connecticut
Delaware
Florida
Georgia
Guam
Hawaii
Idaho
Illinois
Indiana
Iowa
Kansas
Kentucky
Louisiana
Maine
Maryland
Massachusetts
Michigan
Minnesota
Mississippi
Missouri
Montana
Nebraska
Nevada
New Hampshire
New Jersey
New Mexico
New York
North Carolina
North Dakota
Northern Mariana Islands
Ohio
Oklahoma
Oregon
Pennsylvania
Puerto Rico
Rhode Island
South Carolina
South Dakota
Tennessee
Texas
U.S. Virgin Islands
Utah
Vermont
Virginia
Washington
West Virginia
Wisconsin
Wyoming
Canadian Province
*
Toggle Dropdown
選択
Alberta
British Columbia
Manitoba
New Brunswick
Newfoundland and Labrador
Northwest Territories
Nova Scotia
Nunavut
Ontario
Prince Edward Island
Quebec
Saskatchewan
Yukon
Chinese Province
*
Toggle Dropdown
選択
(HEB) Hebei Province
(HEN) Henan Province
(HUB) Hubei Province
(HUN) Hunan Province
(SAA) Shaanxi Province
(SAX) Shanxi Province
Anhui Province
Beijing Municipality
Chongqing Municipality
Fujian Province[e]
Gansu Province
Guangdong Province
Guangxi Zhuang Autonomous Region
Guizhou Province
Hainan Province
Heilongjiang Province
Hong Kong Special Administrative Region
Inner Mongolia Autonomous Region
Jiangsu Province
Jiangxi Province
Jilin Province
Liaoning Province
Macau Special Administrative Region
Ningxia Hui Autonomous Region
Qinghai Province
Shandong Province
Shanghai Municipality
Sichuan Province
Tianjin Municipality
Xinjiang Uyghur Autonomous Region
Yunnan Province
Zhejiang Province
German Province
*
Toggle Dropdown
選択
Baden-Württemberg
Bavaria
Berlin
Brandenburg
Bremen
Hamburg
Hesse
Lower Saxony
Mecklenburg-Vorpommern
North Rhine-Westphalia
Rhineland-Palatinate
Saarland
Saxony
Saxony-Anhalt
Schleswig-Holstein
Thuringia
Company/Organisation
*
What is your primary research area
*
Toggle Dropdown
Select an option
Sensors - Bio
Sensors - MEMS
Discretes - GaN PE/RF
Discretes - SiC PE
Central R&D Cleanroom
Opto - GaAs/InP Datacom
Opto - 3D Sensor
Opto - uLED and AR/AV
Quantum Technology
Nano-Carbon & 2D Materials
What are your other research areas
下記より選択してください。
Toggle Dropdown
下記より選択してください。
Sensors - Bio
Sensors - MEMS
Discretes - GaN PE/RF
Discretes - SiC PE
Central R&D Cleanroom
Opto - GaAs/InP Datacom
Opto - 3D Sensor
Opto - uLED and AR/AV
Quantum Technology
Nano-Carbon & 2D Materials
How can we help you
*
Toggle Dropdown
Select an option
Actively looking to buy
Looking to buy within 1 year
Investigating technologies for my application
Expanding my knowledge
Job Title
Serial Number
Message
Would you like to receive occasional emails about our products, applications and events?
*
Yes
No
By submitting this form I agree that Oxford Instruments will process my data in the manner described in the
Privacy Policy
お問い合わせ
First Name
*
Last Name
*
Email
*
Country/Region
*
Toggle Dropdown
国地域
Afghanistan
Aland Islands
Albania
Algeria
American Minor Outlying Islands
American Samoa
American Virgin Islands
Andorra
Angola
Anguilla
Antarctica
Antigua and Barbuda
Argentina
Armenia
Aruba
Australia
Austria
Azerbaijan
Bahamas
Bahrain
Bangladesh
Barbados
Belgium
Belize
Benin
Bermuda
Bhutan
Bolivia
Bonaire, Sint Eustatius and Saba
Bosnia and Herzegovina
Botswana
Bouvet Islands
Brazil
British Indian Ocean Territory
British Virgin Islands
Brunei Darussalam
Bulgaria
Burkina Faso
Burundi
Cabo Verde
Cambodia
Cameroon
Canada
Cayman Islands
Central African Republic
Chad
Chile
China
Christmas Island
Cocos (Keeling) Islands
Colombia
Comoros
Cook Islands
Costa Rica
Cote d'Ivoire
Croatia
Cuba
Curaçao
Cyprus
Czech Republic
Democratic Republic of the Congo
Denmark
Djibouti
Dominica
Dominican Republic
Ecuador
Egypt
El Salvador
Equatorial Guinea
Eritrea
Estonia
Ethiopia
Falkland Islands
Faroe Islands
Federated States of Micronesia
Fiji
Finland
France
French Guyana
French Polynesia
French Southern Territories
Gabon
Gambia
Georgia
Germany
Ghana
Gibraltar
Greece
Greenland
Grenada
Guadeloupe
Guam
Guatemala
Guernsey
Guinea
Guinea-Bissau
Guyana
Haiti
Heard and McDonald Islands
Honduras
Hong Kong
Hungary
Iceland
India
Indonesia
Iraq
Ireland
Isle of Man
Israel
Italy
Jamaica
Japan
Jersey
Jordan
Kazakhstan
Kenya
Kiribati
Kuwait
Kyrgyzstan
Laos
Latvia
Lebanon
Lesotho
Liberia
Libya
Liechtenstein
Lithuania
Luxembourg
Macao
Madagascar
Malawi
Malaysia
Maldives
Mali
Malta
Marshall Islands
Martinique
Mauretania
Mauritius
Mayotte
Mexico
Moldova
Monaco
Mongolia
Montenegro
Montserrat
Morocco
Mozambique
Myanmar
Namibia
Nauru
Nepal
Netherlands
New Caledonia
New Zealand
Nicaragua
Niger
Nigeria
Niue
Norfolk Islands
North Mariana Islands
Norway
Oman
Pakistan
Palau
Panama
Papua New Guinea
Paraguay
Peru
Philippines
Pitcairn Islands
Poland
Portugal
Puerto Rico
Qatar
Republic of North Macedonia
Republic of South Sudan
Republic of the Congo
Reunion
Romania
Rwanda
Saint Barthelemy
Saint Helena
Saint Kitts and Nevis
Saint Martin
Samoa
San Marino
Sao Tome and Principe
Saudi Arabia
Senegal
Serbia
Seychelles
Sierra Leone
Singapore
Sint Maarten (Dutch part)
Slovakia
Slovenia
Solomon Islands
Somalia
South Africa
South Georgia and the Southern Sandwich Islands
South Korea
Spain
Sri Lanka
St. Lucia
St. Pierre and Miquelon
St. Vincent and the Grenadines
State of Palestine
Suriname
Svalbard
Sweden
Switzerland
Taiwan
Tajikistan
Tanzania
Thailand
The Kingdom of Eswatini
Timor-Leste
Togo
Tokelau Islands
Tonga
Trinidad and Tobago
Tunisia
Turkey
Turkmenistan
Turks and Caicos Islands
Tuvalu
Uganda
Ukraine
United Arab Emirates
United Kingdom
Uruguay
USA
Uzbekistan
Vanuatu
Vatican City
Venezuela
Vietnam
Wallis and Futuna Islands
West Sahara
Yemen
Zambia
Zimbabwe
US State
*
Toggle Dropdown
選択
Alabama
Alaska
Arizona
Arkansas
California
Colorado
Connecticut
Delaware
Florida
Georgia
Guam
Hawaii
Idaho
Illinois
Indiana
Iowa
Kansas
Kentucky
Louisiana
Maine
Maryland
Massachusetts
Michigan
Minnesota
Mississippi
Missouri
Montana
Nebraska
Nevada
New Hampshire
New Jersey
New Mexico
New York
North Carolina
North Dakota
Northern Mariana Islands
Ohio
Oklahoma
Oregon
Pennsylvania
Puerto Rico
Rhode Island
South Carolina
South Dakota
Tennessee
Texas
U.S. Virgin Islands
Utah
Vermont
Virginia
Washington
West Virginia
Wisconsin
Wyoming
Canadian Province
*
Toggle Dropdown
選択
Alberta
British Columbia
Manitoba
New Brunswick
Newfoundland and Labrador
Northwest Territories
Nova Scotia
Nunavut
Ontario
Prince Edward Island
Quebec
Saskatchewan
Yukon
Chinese Province
*
Toggle Dropdown
選択
(HEB) Hebei Province
(HEN) Henan Province
(HUB) Hubei Province
(HUN) Hunan Province
(SAA) Shaanxi Province
(SAX) Shanxi Province
Anhui Province
Beijing Municipality
Chongqing Municipality
Fujian Province[e]
Gansu Province
Guangdong Province
Guangxi Zhuang Autonomous Region
Guizhou Province
Hainan Province
Heilongjiang Province
Hong Kong Special Administrative Region
Inner Mongolia Autonomous Region
Jiangsu Province
Jiangxi Province
Jilin Province
Liaoning Province
Macau Special Administrative Region
Ningxia Hui Autonomous Region
Qinghai Province
Shandong Province
Shanghai Municipality
Sichuan Province
Tianjin Municipality
Xinjiang Uyghur Autonomous Region
Yunnan Province
Zhejiang Province
German Province
*
Toggle Dropdown
選択
Baden-Württemberg
Bavaria
Berlin
Brandenburg
Bremen
Hamburg
Hesse
Lower Saxony
Mecklenburg-Vorpommern
North Rhine-Westphalia
Rhineland-Palatinate
Saarland
Saxony
Saxony-Anhalt
Schleswig-Holstein
Thuringia
Company/Organisation
*
What is your primary research area
*
Toggle Dropdown
Select an option
Sensors - Bio
Sensors - MEMS
Discretes - GaN PE/RF
Discretes - SiC PE
Central R&D Cleanroom
Opto - GaAs/InP Datacom
Opto - 3D Sensor
Opto - uLED and AR/AV
Quantum Technology
Nano-Carbon & 2D Materials
What are your other research areas
下記より選択してください。
Toggle Dropdown
下記より選択してください。
Sensors - Bio
Sensors - MEMS
Discretes - GaN PE/RF
Discretes - SiC PE
Central R&D Cleanroom
Opto - GaAs/InP Datacom
Opto - 3D Sensor
Opto - uLED and AR/AV
Quantum Technology
Nano-Carbon & 2D Materials
How can we help you
*
Toggle Dropdown
Select an option
Actively looking to buy
Looking to buy within 1 year
Investigating technologies for my application
Expanding my knowledge
Job Title
Serial Number
Message
Would you like to receive occasional emails about our products, applications and events?
*
Yes
No
By submitting this form I agree that Oxford Instruments will process my data in the manner described in the
Privacy Policy
関連製品
OpAL
PlasmaPro 80 ICP RIE
PlasmaPro 100 RIE
PlasmaPro 800 RIE
1000 Series Glass X-ray Tube
FlexAL ALD
PlasmaPro 100 Nano CVD
新しくタブを開く
オックスフォード・インストゥルメンツー事業部ページ
