アップグレード - Plasma Technology - オックスフォード・インストゥルメンツ

Hardware Support

Advanced Energy Paramount Generator

Automatic Endpoint Detectors

Automatic Pressure Control

Anti-Contamination Shield

Advanced Energy Comdel Generator

Dual CM Gauge Switching

Gas Pod

Integrated Gas Pod

Light Tower

LN2 Autochangeover Unit

Logviewer Software

PTIQ Software

SECS GEM Automation

Soft Pump

Vacuum Capacitor AMU

Windows 10 Upgrade

Wide Temperature Range Electrode

X20 Control System

Spec Sheets

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システムごとのアップグレード

	PECVD		RIE			ICP		Ion Beam	CVD	ALD
	PlasmaPro 800	PlasmaPro 100	PlasmaPro 80	PlasmaPro 800	PlasmaPro 100	PlasmaPro 80	PlasmaPro 100	Ionfab	Nanofab	FlexAL
Advanced Energy社製Paramountジェネレータ		✓					✓	✓
汚染防止シールド								✓
自動圧力制御			✓	✓	✓	✓	✓
バーコード読み取り式ウェーハスキャンソフトウェア	✓	✓	✓	✓	✓	✓	✓	✓	✓	✓
Comdelジェネレータ	✓	✓	✓	✓	✓	✓	✓
デュアルCMゲージ・スイッチング		✓			✓		✓			✓
ガスポッド	✓	✓	✓	✓	✓	✓	✓	✓	✓	✓
Glassman 電源								✓
ハイデン HMT RGA								✓
統合型ガスポッド			✓
ライトタワー	✓	✓	✓	✓	✓	✓	✓	✓	✓	✓
液体窒素自動切り替えユニット					✓
Logviewer ソフトウェア	✓	✓	✓	✓	✓	✓	✓	✓	✓	✓
PTIQ ソフトウェア	✓	✓	✓	✓	✓	✓	✓	✓	✓
SECS GEM オートメーション	✓	✓	✓	✓	✓	✓	✓	✓	✓	✓
ソフトポンプ	✓	✓	✓	✓	✓	✓	✓	✓	✓	✓
TeamViewer ソフトウェア	✓	✓	✓	✓	✓	✓	✓	✓	✓	✓
TEOS 液体レベルセンサー	✓	✓							✓	✓
Vacuum Capacitor AMU	✓	✓	✓	✓	✓	✓	✓	✓	✓	✓
広温度範囲電極			✓	✓	✓	✓	✓
Windows 10 アップグレード	✓	✓	✓	✓	✓	✓	✓	✓	✓	✓
X20 コントロールシステム	✓	✓	✓	✓	✓	✓	✓	✓	✓

NEW

Introducing... PTIQ Software

PTIQ is the latest intelligent software solution for PlasmaPro and Atomfab processing equipment.

Exceptional level of responsive system control
Optimise system and process performance
Different levels of software to suit your requirements
Brand new intuitive layout and design

PTIQの詳細はこちら

PTIQ

Global Customer Support

Oxford Instruments is committed to providing a comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of your system.

Remote diagnostics software provides quick and easy fault diagnosis and resolution.
Support contracts are available to suit the budget and situation.
Global spares in strategic locations for quick response.

FIND OUT MORE